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  • 姓名: 許高博
  • 性別: 男
  • 職稱: 研究員
  • 職務(wù): 
  • 學(xué)歷: 博士
  • 電話: 010-82995723
  • 傳真: 
  • 電子郵件: xugaobo@ime.ac.cn
  • 所屬部門: 集成電路先導(dǎo)工藝研發(fā)中心
  • 通訊地址: 北京市朝陽區(qū)北土城西路3號

    簡  歷:

  • 教育背景  

    1998.9-2002.7   山東大學(xué)               工學(xué)學(xué)士 

    2003.9-2009.7   中國科學(xué)院微電子研究所 工學(xué)博士 

    2016.11-2017.12 德克薩斯大學(xué)奧斯汀分校 訪問學(xué)者 

    工作簡歷  

    2009.7-2011.9 中國科學(xué)院微電子研究所 助理研究員 

    2011.9-2021.7 中國科學(xué)院微電子研究所 副研究員 

    2021.7-至今  中國科學(xué)院微電子研究所 研究員 

    社會任職:

  •  

    研究方向:

  • 新型半導(dǎo)體器件,集成電路先導(dǎo)工藝,先進(jìn)半導(dǎo)體探測器

    承擔(dān)科研項(xiàng)目情況:

  • 1. 22納米關(guān)鍵工藝技術(shù)先導(dǎo)研究與平臺建設(shè),02科技重大專項(xiàng),2009-2014,項(xiàng)目骨干

    2. 超薄HfSiON+MOx疊層高k柵介質(zhì)研究及制備,北京市自然科學(xué)基金,2012-2013,項(xiàng)目負(fù)責(zé)人 

    3. 低功耗隧穿場效應(yīng)晶體管研究及制備,中國科學(xué)院微電子研究所所長基金,2013-2014,項(xiàng)目負(fù)責(zé)人 

    4. 離子摻雜高k柵介質(zhì)/金屬柵技術(shù)研究及理論分析,中國科學(xué)院微電子器件與集成技術(shù)重點(diǎn)實(shí)驗(yàn)室開放課題,2015-2016,項(xiàng)目負(fù)責(zé)人 

    5. 基于多元硅漂移探測器的高效同步輻射熒光譜儀,中國科學(xué)院科研儀器設(shè)備研制項(xiàng)目,2017-2018,項(xiàng)目骨干 

    6. 小像素二維探測器,國家重點(diǎn)研發(fā)計(jì)劃,2017-2020,項(xiàng)目骨干 

    7. 面向自由電子激光的大陣列硅基探測器關(guān)鍵技術(shù)研制,中國科學(xué)院科研儀器設(shè)備研制項(xiàng)目,2020-2022,項(xiàng)目骨干 

    8. 基于FeFET的超低能耗邊緣智能芯片,校企產(chǎn)研項(xiàng)目,2021-2022,項(xiàng)目負(fù)責(zé)人 

    9. 高密度三維IGZO DRAM存儲器PVD,北京超弦存儲器研究院項(xiàng)目,2022-2024,項(xiàng)目負(fù)責(zé)人 

    10. 超高幀頻大動態(tài)范圍X射線探測系統(tǒng),國家重大科研儀器研制項(xiàng)目,2022-2026,項(xiàng)目骨干

    代表論著:

  • 1.     Gaobo Xu, Qiuxia Xu, Thermal stability of HfTaON films prepared by physical vapor deposition, Journal of Semiconductors, 2009, 30 (2): 023002. 

    2.    Gaobo Xu, Qiuxia Xu, Characteristics of high-quality HfSiON gate dielectric prepared by physical vapor deposition, Chinese Physics B, 2009, 18 (2): 768-772. 

    3.     Gaobo Xu, Qiuxia Xu, Huaxiang Yin, Huajie Zhou, Tao Yang, Jiebin Niu, Jiahan Yu, Junfeng Li and Chao Zhao, High performance HfSiON/TaN NMOSFET with a gate-last process, Chinese Physics B, 2013, 22(11): 117309. 

    4.     Gaobo Xu, Qiuxia Xu, Huaxiang Yin, Huajie Zhou, Tao Yang, Jiebin Niu, Xiaobin He, Lingkuan Meng, Jiahan Yu, Junfeng Li, Jiang Yan, Chao Zhao and Dapeng Chen, Characterization of HfSiAlON/MoAlN PMOSFET fabricated using a novel gate-last process, Chinese Physics Letters, 2013, 30(8): 087303. 

    5.     Qiuxia Xu, Gaobo Xu, Huajie Zhou, Huilong Zhu, Qingqing Liang, Jinbiao Liu, Junfeng Li, Jinjuan Xiang, Miao Xu, Jian Zhong, Weijia Xu, Chao Zhao, Dapeng Chen and Tianchun Ye, Ion implanted TiN metal gate with dual-band edge work function and excellent reliability for advanced CMOS device applications, IEEE Transaction on Electron Devices, 2015, 62(12): 1-7. 

    6.     Guoliang Tian, Jinshun Bi*, Gaobo Xu*, Kai Xi, Xueqin Yang, Sandip Majumdar, Huaxiang Yin, Qiuxia Xu, Wenwu Wang, Single-event-transient effects in silicon-on-insulator ferroelectric double-gate vertical tunneling field effect transistors. Science China. Information Sciences, 2020, 63(12)229403. 

    7.    Guoliang Tian, Jinshun Bi*, Gaobo Xu*, Kai Xi, Huaxiang Yin, Qiuxia Xu and Wenwu Wang, Heavy ion induced single-event-transient effects in nanoscale ferroelectric vertical tunneling transistors by TCAD simulation, Semiconductor Science and Technology, 2020, 35(10): 105010.  

    8.    Gangping Yan, Gaobo Xu*, Jinshun Bi*, Guoliang Tian, Qiuxia Xu, Huaxiang Yin, Yongliang Li, Accumulative total ionizing dose (TID) and transient dose rate (TDR) effects on planar and vertical ferroelectric tunneling-field-effect-transistors (TFET), Microelectronics Reliability, 2020, 114(9): 113855. 

    9.    Gangping Yan, Kai Xi, Gaobo Xu*, Jinshun Bi*, Huaxiang Yin, Analysis of Single Event Effects in Capacitor-Less 1T-DRAM Based on an InGaAs Transistor, IEEE Transactions on Electron Devices, 2021, 68(4): 1604-1609. 

    10.  Gangping Yan, Hong Yang, Weibing Liu, Na Zhou, Yanpeng Hu, Yunfei Shi, Jianfeng Gao, Guoliang Tian, Yadong Zhang, Linjie Fan, Guilei Wang, Gaobo Xu*, Jinshun Bi , Huaxiang Yin*, Chao Zhao, and Jun Luo, Mechanism Analysis of Ultralow Leakage and Abnormal Instability in InGaZnO Thin-Film Transistor Toward DRAM, IEEE Transactions on Electron Devices, 2022, 69 (5): 2417-2422. 

    專利申請:

  • 1.  許高博,徐秋霞,一種鉿硅鋁氧氮高介電常數(shù)柵介質(zhì)的制備方法,ZL200910077623.8

    2.  許高博,徐秋霞,一種半導(dǎo)體器件的制備方法,ZL201010594946.7 

    3.  許高博,徐秋霞,一種存儲器及其制造方法,ZL201110143077.0 

    4.  許高博,徐秋霞,葉甜春,n型半導(dǎo)體器件及其制造方法,ZL201110183594.0 

    5.  許高博,徐秋霞,形成半導(dǎo)體器件替代柵的方法以及制造半導(dǎo)體器件的方法,ZL201210500533.7 

    6.  許高博,殷華湘,徐秋霞,半導(dǎo)體器件制造方法,ZL201510616088.4 

    7.  許高博,殷華湘,翟瓊?cè)A,一種漂移探測器的雙面制備方法及漂移探測器,ZL201911154720.2 

    8.  許高博,殷華湘,翟瓊?cè)A,一種漂移探測器的制備方法及漂移探測器,ZL201911155931.8 

    9.  Gabo Xu,Qiuxia Xu,P-type Semiconductor Device And Method For Manufacturing The SameUS 8786032 

    10. GaoboXu,Qiuxia XuMethod For Integrating Replacement Gate In Semiconductor Device,US 8377769

    獲獎及榮譽(yù):